Vacuum robotic arm

The wafer handling series vacuum robotic arm is mainly used in semiconductor processing and is a key automation equipment responsible for wafer transfer between different vacuum stations. The network type robot controller developed by Xinsong Company is used for control, which has the characteristics of compact structure, flexible configuration, and high control performance. It can adapt to different robot bodies, achieve communication between robot controllers, and between robot controllers and IC equipment, and facilitate the composition of different application systems. At present, Xinsong Company has developed six models of atmospheric robotic arms, including single arm, double arm, Scola type, and frog type, which can be customized according to customer requirements. They have been applied by users and have formed a series of products to meet the requirements of different users.