Atmospheric Manipulator

The wafer handling series atmospheric robotic arm is mainly used in semiconductor processing, and is a key automation equipment responsible for wafer transfer between different workstations at the atmospheric end. This series of atmospheric robotic arms adopts lightweight, high rigidity arms, high-precision, high-performance AC servo motors and harmonic reducers, which can achieve high-speed and smooth operation. This robot meets the lubrication requirements for moving parts in clean environments, ensuring long-term stable operation and no impact on clean environments. The network type robot controller developed by Xinsong Company is used for control, which has the characteristics of compact structure, flexible configuration, and high control performance. It can adapt to different robot bodies, achieve communication between robot controllers, and between robot controllers and IC equipment, and facilitate the composition of different application systems. At present, Xinsong Company has two types and four models of single arm and double arm, which can be customized according to customer requirements. It has been applied by users and has formed a series of products to meet the requirements of different users.