Step height measurement

Step height measurement

Accurate and reproducible measurement of step height is required in many high-tech applications. Taylor Hobson offers many instruments specifically designed to meet these high requirements for measuring step height. The coverage range of step height is between sub nanometer and millimeter, with repeatability below 0.1 nanometer.

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Three dimensional step height
Provide a height difference between two planes defined for two regions on the surface. **The area is defined as the reference area, and the software will adjust the * least squares plane in this area. Then measure the second plane based on this. At the same time, the average step height, maximum height, minimum height, and angle difference are also measured.

2D step height
Provide a step height measurement method for simple geometric shapes such as etched lines or rectangular areas. In the case of exposed edges, the height of two-dimensional steps can also be used to measure thickness.

ISO 5436-1 Step Height
It is important to follow standard measurement methods when comparing step height measurements made by different measuring instruments. ISO 5436-1 provides an internationally recognized method for measuring step height. The above instruments all support this standard.