Q300T ES Plus Large Chamber High Vacuum Ion Sputtering and Thermal Evaporation Integrated Coating Instrument

Q300T ES PlusLarge chamber high vacuum ion sputtering and thermal evaporation integrated coating instrument

Q300T ES PlusIt is a coating system that integrates two coating methods: ion sputtering and thermal evaporation. As a successfulQSeries sputtering/A member of the carbon coating machine family,Q300T ES PlusIt is a large chamber turbo molecular pump vacuum coating system, which is very suitable for metal evaporation coating on large diameter samples or multiple smaller samples,Q300T ES PlusIt is also equipped with interchangeable sputtering heads and carbon evaporation heads.

Q300T ES PlusIon sputtering, metal evaporation, and carbon deposition systems are combined in a large working chamber. The coating head can be replaced within seconds, and the intelligent logic system automatically identifies which coating head is in place and displays the corresponding operation settings. Turbomolecular pump vacuum system, capacitive touch screen control, high-resolution ion sputtering coating, high vacuum carbon rod coating/Metal evaporation coating; There areLEDStatus indicator light. Standard with fast release ion sputtering coating head and diameter57mm x 0.1mmThe chromium target and fast release metal evaporation coating head are interchangeable. Standard diameter50Millimeter wafer sample stage. Equipped with a full range vacuum gauge component for high vacuum measurement.

For the use of three target plating to produce large-area film layers of the same material, please refer toQ300T T PlusFor other large chamber coating instruments, please refer toK975X/K975Sas well asQ300T D Plus.

Instrument features:

•Capacitive touch screen, high sensitivity, easier to touch and use

•The user interface software has been fully updated, using modern smartphone technology interface

•Comprehensive text help page

• USBThe interface allows for easy software updates and backup of recipe files/copy toUSBmemory

• logThe file format is.csv, containing date, time, and working parameters, can be exported toExcelOr analyze in similar software

•Allow multiple users to input and store coating solutions, and arrange each user's formula based on recent usage

•BinuclearARMProcessor, capable of achieving fast response display; Full graphic interface with touch screen buttons, including recently used ones1000Features such as a coating log and reminders when maintenance expires

•Full range vacuum gauge

•Integrated ion sputtering, metal evaporation, and carbon deposition integrated system

•Optional film thickness monitoring accessory（FTM）, optional high chamber

•Large and multicoloredLEDIndicator light, realizing visual status indication; After the program is completed, there will be an audio sound prompt

Recommended application:

Perform metal evaporation coating on large diameter samples or multiple smaller samples

•High resolution coating,SEMapplication

• EDX, WDS, EBSDcarbon coating

Q300T ES PlusIt's EnglandQuorumInternationally recognized productsQA part of the series of coating machines, used by thousands of customers worldwide.QThe series aims to provideSEM、TEMProvide high-quality coating solutions for thin film applications,QThe series has diverse functions, reasonable prices, and is easy to use. These products are exclusively for scientific research purposes.

Q PlusThere are also versions of the series coating machine with smaller chambers, please refer to:Q150R Plus、Q150T Plusas well asQ150V Plus；SC7620andQ150GBIt is also an optional model.