PIE_Tergeo plasma cleaner from the United States

TergeoSeries desktopPlasma cleaninginstrument

TergeoThe series desktop fully automatic plasma cleaner has functions such as cleaning, ashing, etching, etc. It can be used to clean nanoscale samples, remove photoresist, clean wafers and integrated circuit bonding pads, perform ashing of coal and organic matter, activate functional groups on polymer, metal, and ceramic surfaces, obtain surface hydrophilicity, improve bonding strength and printability, and promote biocompatibility of medical devices. It can integrate both immersion and remote plasma sources, which can clean the electron microscope aperture andTEMSample rods can also clean graphene, carbon nanotubes, diamond-like carbon, and other materialsTEMFragile fine samples such as porous carbon films loaded onto the net.

TergeoseriesThere are three models available:

1）Tergeo Plasma cleaner：This is aAn economical and practical plasma cleaning device.

2）Tergeo-PlusLarge chamber plasma cleaner：This is a plasma cleaner with a large sample chamber, capable of cleaning up to150mmThe sample.

3）Tergeo-EMPlasma cleaner:be used forTEMsamplerodcleanas well asremoveSEM & TEMCarbon hydrogen contamination of the sample.

Instrument features:

• TergeoThe series is the only plasma cleaner that can support two cleaning modes in one system.

Tergeo-EMEquipped with dual plasma sources as standard and featuring cleanlinessTEMThe function of the sample rod; The other two

Standard immersion plasma source for sample surface cleaning, etching, ashing, optional remote plasmonic

Ziyuan is used for mild pollution removal and surface activation of fragile and vulnerable samples.

• Adopting patented technology of plasma intensity sensor to achieve real-time quantitative measurement of plasma intensity

• 13.56MHzRF generator, automatic impedance matching tuning, dual source version capable of pulse operation

• Intuitive touchscreen user interface, capable of storage20Article usersProgram,fully automaticfunction

• useMFC(Mass flow controller)Regulated gas delivery control

• High purity quartz sample chamber and sample holder

Recommended application:

•Cleaning before wire bonding and packaging of integrated circuit chips

•cleanTEMandSEMSample, remove hydrocarbon contamination

•Hydrophilic or hydrophobic surface wetting plasma treatment

•Enhanced epoxy resin/Adhesive bonding strength

• Used for cleaning optical, laser, communication glass and fiber optic heads

•improveMEMSWettability of microfluidic devices

•Etching photoresist

• Peel off the film for failure analysis

•Surface treatment and activation of medical devices such as contact lenses and medical implants

The experimental resultsConsistency and repeatability are crucial for scientific research and production operationsIt is crucialTherefore,

We have integrated multiple process control technologies to monitor and control key parameters, such as plasma sensing

Automatic mass flow controller for instruments, pressure sensors, and gas inputs.TergeoPlasma cleaning

The operation of the machine is fully automatic. Intuitive user interface, combined with7The inch touch screen enablesOur department

columnThe operation of the instrument is as simple as a smart board. Embedded microcontroller support20A customizable itemformula

program.TergeoThe series plasma processing system adopts advanced process control technology, which can be used for

Provide users with repetitive daily operational performance.

TergeoSeries desktopPlasma etching and surface cleaningcleansystemCan be used forResearch and developmentWaiting for applications.TEMuseHousehold, pleaseSelectoursTergeo-EMHaving cleanlinessTEMThe function of the sample rodplasmaCleaning device;TEMandSEMAnd other useshouseholdYou can also view itEM-KLEENRemote plasmacleanSystem.For applications such as sample rod storage, optionalMulti purpose sample cleaning and storage chamber.