K975S High Vacuum Thermal Evaporation Coating Instrument

K975X/K975SHigh vacuum thermal evaporation coating instrument

K975XThe turbo pump high vacuum evaporator is a multi-purpose coating system that has flexibility and modular expansion capabilities to adapt to different sample preparations.K975XCan implement a series of sample preparation techniques, includingTEMCarbon support film and overlay film, carbon/Metal evaporation, low angle projection(Optional)And by using dual source evaporation(Optional)Perform sequential coating, sputtering coating accessories(Optional)Can be applied to various target materials. The unique drawer style sample loading system allows users to easily place various samples, and the hinged top cover structure also makes it easy to reach various areas inside the working chamber.

K975Sbe based onK975XHowever, it has a special and larger sample loading door that allows for the insertion of8Inches（200mm）Carbon plating on wafers or similar large samples. The carbon rod evaporation source is directly installed on the top cover plate of the vacuum chamber, which facilitates the operation of the carbon gun and provides the optimal distance from the evaporation source to the sample for large diameter samples. WithK975XDifferent,K975SThere is no installation of metal evaporation source and corresponding bottom plate installation column.

Instrument features:

•Fully automatic vacuum pumping system

•The sample size can reach140Millimeter square or200Millimeter diameter

•Unique design“anti-stick”Carbon rod evaporation gun

•Drawer style sample loading system

•Optional evaporation types with four evaporation settings

•Controlled vacuum breaking and exhaust control

•Optional sputtering accessories

•Optional film thickness monitoring accessory（FTM）

Recommended application:

• Carbon rod/Carbon rope evaporation

• Metal evaporation

Scanning electron microscope aperture cleaning (molybdenum boat)

•TEMUsing carbon supported membrane and overlay membrane

• Low angle shadows

Continuous coating using dual source evaporation

•EDX、WDS、EBSDanalysis

• Optional magnetron sputtering applications

aboutSEMThe application of mechanical pump vacuum spraying gold and carbon spraying instrument, please refer toSC7620andQ150R PlusForFE-SEMFor the ultrafine particle coating required by the application, it is recommended to use a high vacuum coating instrument. Please refer toQ150T Plus、Q150V PlusorQ150GBIf you need a large chamber version of the coating system, please refer to:Q300T T Plus、Q300T D Plus、Q300T ES PlusandK975X/K975SThese products are exclusively for scientific research purposes.