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Address
2-728B, Hongqiao Center, New City Plaza, No. 281 Zhongshan North Road, Nanjing City
Nanjing Qinsi Technology Co., Ltd
2-728B, Hongqiao Center, New City Plaza, No. 281 Zhongshan North Road, Nanjing City
EBIC, produced by KED under Deben, is a sample current and electron beam induced current measurement amplifier that can perform absorption current measurement, absorption current imaging, and electron beam induced current imaging. It can also be used to bias samples. The equipment required for performing EBIC imaging is a scanning electron microscope, EBIC amplifier, and electric vacuum feedthrough. The electrons injected from the electron beam break the semiconductor equilibrium state, generating electron/hole pairs. The EBIC signal is mainly generated from the embedded diffusion layer (transistor and diode). By amplifying the induced current or voltage generated by the electron beam, SEM monitoring images can be formed from this effect.