YAMATO plasma cleaning machine V1000/1000X/1000XS RIE · DP mode, multi-stage parallel flat electrode, large capacity

NegotiableUpdate on 03/03

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Nature of the Manufacturer: Producers

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Overview

High frequency plasma surface treatment device ■ Operability · Function ● RF 13.56Mhz0-1000W high-power model, with dual mode plasma cleaning machine as standard for DP and RIE, capable of handling more complex processes Standard equipped with ionization vacuum gauge, real-time display of vacuum degree, making control more accurate

Product Details

High frequency plasma surface treatment device

■Operability and functionality
The RF 13.56Mhz 0-1000W high-power model comes standard with a dual-mode plasma cleaning machine for DP and RIE, which can handle more complex processes
Equipped with ionization vacuum gauge as standard, it displays the vacuum degree in real-time, making control more precise.
LCD touch screen control, easy to operate and retrieve data.

■Security and Protection
The standard equipment is equipped with vacuum leak detection function, which can check the vacuum and leak situation of the equipment as needed.
Equipped with overcurrent leakage protection, vacuum pump, RF generator, and standard overcurrent leakage protection devices for all parts of the power supply.
Generator protection circuit: When overload or RF generator problems occur, the frequency can be automatically reduced to protect the generator.
Door lock switch: The power cannot be turned on when the door is not fully closed.
Side panel lock: When the body side panel suddenly opens or is not closed properly, the power will stop.
Emergency stop button (EMO) is standard equipment.
When an abnormality occurs in the device, the device itself will issue a warning signal and perform the following actions: 1) Close the main valve. (2) Close the gas supply valve. (3) Stop outputting the oscillator. (4) Stop processing time. (5) Sound and light alarm

■Product advantages
The plasma cleaning machine has good cleaning effect, high cleaning efficiency, high power, and wide application range.
DP&RIE dual-mode processing, capable of handling more complex processes.
Equipped with high-precision adapter and high-performance RF power supply.
Variable electrode structure improves plasma treatment efficiency.
The safety protection measures are comprehensive, effectively preventing damage to the machine and samples.
We can provide customized product services according to specific needs.

■ Product drawings

■ Equipment installation diagram